Research in Engineering and Aviation
Modeling electric field sensitive scanning probe measurements for a tip of arbitrary shape
Author(s): I. Kuljanishvili, S. Chakraborty, I. J. Maasilta, S. H. Tessmer, and M. R. Melloch
Journal: Ultramicroscopy. 102(1): pp. 7-12, 2004. DOI: 10.1016/j.ultramic.2004.07.004
We present a numerical method to model electric-field-sensitive scanning probe microscopy measurements which allows for a tip of arbitrary shape and invokes image charges to exactly account for a sample dielectric overlayer. The method is applied to calculate the spatial resolution of a subsurface charge accumulation imaging system, achieving reasonable agreement with experiment.